ELECTROCHEMICAL PROCESSING IN ULSI AND MEMS 3. (AT 211TH ECS MEETING)

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002128
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Details

  • Title: Electrochemical Processing in ULSI and MEMS 3
  • Subtitle: Held at the 211th ECS Meeting
  • Date/Location: Held 6-11 May 2007, Chicago, Illinois.
  • Series: ECS Transactions Volume 6 No.08
  • Editor: Dukovic, J.
  • ISBN: 9781604238846
  • Pages: 276 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Electrochemical Society (ECS)
  • POD Publisher: Curran Associates, Inc. ( Jan 2008 )

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  • Title: Electrochemical Processing in ULSI and MEMS 3
  • Subtitle: Held at the 211th ECS Meeting
  • Date/Location: Held 6-11 May 2007, Chicago, Illinois.
  • Series: ECS Transactions Volume 6 No.08
  • Editor: Dukovic, J.
  • ISBN: 9781604238846
  • Pages: 276 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Electrochemical Society (ECS)
  • POD Publisher: Curran Associates, Inc. ( Jan 2008 )