 | Title: | Chemical Mechanical Polishing 9 | | Desc: | Proceedings of a meeting held 18-23 May 2008, Phoenix, Arizona.
Held at the 213th ECS Meeting | | Series: | ECS Transactions Volume 13 No.04 | | Sponsor: | Electrochemical Society ( ECS ) | | Editor: | Banerjee, G. | | ISBN: | 9781605601816 | | Pages: | 81 (1 Vol) | | Format: | Softcover | | Publisher: | Curran Associates, Inc. ( Jun 2008 ) |
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