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COPPER INTERCONNECTS, NEW CONTACT METALLURGIES/STRUCTURES, AND LOW-K INTER-LEVEL DIELECTRICS. (AT 214TH ECS MEETING)

COPPER INTERCONNECTS, NEW CONTACT METALLURGIES/STRUCTURES, AND LOW-K INTER-LEVEL DIELECTRICS.   (AT 214TH ECS MEETING)

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COPPER INTERCONNECTS, NEW CONTACT METALLURGIES/STRUCTURES, AND LOW-K INTER-LEVEL DIELECTRICS. (AT 214TH ECS MEETING)
Item #: 05839
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Product Description
Title:Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Inter-Level Dielectrics
Desc:Proceedings of a meeting held 12-17 October 2008, Honolulu, Hawaii. Held at the 214th ECS Meeting
Series:ECS Transactions Volume 16 No.19
Sponsor:Electrochemical Society ( ECS )
Editor:Mathad, G.
ISBN:9781615672936
Pages:61 (1 Vol)
Format:Softcover
Publisher:Curran Associates, Inc. ( Sep 2009 )
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