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MODELING ASPECTS IN OPTICAL METROLOGY VI

MODELING ASPECTS IN OPTICAL METROLOGY VI

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MODELING ASPECTS IN OPTICAL METROLOGY VI
Item #: 46513
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Product Description
Title:Modeling Aspects in Optical Metrology VI
Desc:Proceedings of a meeting held 26-28 June 2017, Munich, Germany. At SPIE Optical Metrology
Series:Proceedings of SPIE Volume 10330
Editor:Bodermann, Bernd
ISBN:9781510611054
Pages:460 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Jul 2017 )
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