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EMERGING LITHOGRAPHIC TECHNOLOGIES XI

EMERGING LITHOGRAPHIC TECHNOLOGIES XI

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EMERGING LITHOGRAPHIC TECHNOLOGIES XI
Item #: 42804
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Product Description
Title:Emerging Lithographic Technologies XI
Desc:Proceedings of a meeting held 27 February - 1 March 2007, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 6517
Editor:Lercel, Michael J.
ISBN:9780819466365
Pages:1,124 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Mar 2007 )
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