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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXIV

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXIV

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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXIV
Item #: 42806
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Product Description
Title:Advances in Resist Materials and Processing Technology XXIV
Desc:Proceedings of a meeting held 26-28 February 2007, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 6519
Editor:Lin, Qinghuang
ISBN:9780819466389
Pages:1,348 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Mar 2007 )
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