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OPTICAL MICROLITHOGRAPHY XX (3 PARTS)

OPTICAL MICROLITHOGRAPHY XX (3 PARTS)

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OPTICAL MICROLITHOGRAPHY XX (3 PARTS)
Item #: 42807
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Product Description
Title:Optical Microlithography XX
Desc:Proceedings of a meeting held 27 February - 2 March 2007, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 6520
Editor:Flagello, Donis G
ISBN:9780819466396
Pages:1,768 (3 Vols)
Format:Softcover
TOC:View Table of Contents
Publ:SPIE - International Society for Optics and Photonics
POD Publ:Curran Associates, Inc. ( Mar 2007 )
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