 | Title: | Optical Microlithography XX | | Desc: | Proceedings of a meeting held 27 February - 2 March 2007, San Jose, California, USA.
At SPIE Advanced Lithography | | Series: | Proceedings of SPIE Volume 6520 | | Editor: | Flagello, Donis G | | ISBN: | 9780819466396 | | Pages: | 1,768 (3 Vols) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society For Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Mar 2007 ) |
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