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23RD EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

23RD EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

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23RD EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
Item #: 42819
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Product Description
Title:23rd European Mask and Lithography Conference
Desc:Proceedings of a meeting held 22-25 January 2007, Grenoble, France.
Series:Proceedings of SPIE Volume 6533
Editor:Behringer, Uwe F.W.
ISBN:9780819466556
Pages:528 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( May 2007 )
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