 | Title: | Smart Sensors, Actuators, and MEMS III | | Desc: | Proceedings of a meeting held 2-4 May 2007, Maspalomas, Gran Canaria, Spain.
At Microtechnologies for the New Millennium | | Series: | Proceedings of SPIE Volume 6589 | | Editor: | Becker, Thomas | | ISBN: | 9780819467171 | | Pages: | 536 (1 Vol) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society For Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( May 2007 ) |
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