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MODELING ASPECTS IN OPTICAL METROLOGY

MODELING ASPECTS IN OPTICAL METROLOGY

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MODELING ASPECTS IN OPTICAL METROLOGY
Item #: 42881
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Product Description
Title:Modeling Aspects in Optical Metrology
Desc:Proceedings of a meeting held 18-19 June 2007, Munich, Germany. At Optical Metrology
Series:Proceedings of SPIE Volume 6617
Editor:Bosse, Harald
ISBN:9780819467591
Pages:424 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Jun 2007 )
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