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DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, PHOTONICS, AND NANOTECHNOLOGY IV

DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, PHOTONICS, AND NANOTECHNOLOGY IV

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DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, PHOTONICS, AND NANOTECHNOLOGY IV
Item #: 43058
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Product Description
Title:Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Desc:Proceedings of a meeting held 5-7 December 2007, Canberra, ACT, Australia. At SPIE Microelectronics, MEMS, and Nanotechnology
Series:Proceedings of SPIE Volume 6800
Editor:Tan, Hark Hoe
ISBN:9780819469717
Pages:478 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Dec 2007 )
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