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METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXII

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXII

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METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXII
Item #: 43180
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Product Description
Title:Metrology, Inspection, and Process Control for Microlithography XXII
Desc:Proceedings of a meeting held 25-28 February 2008, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 6922
Editor:Allgair, John A.
ISBN:9780819471079
Pages:1,344 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2008 )
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