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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXV

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXV

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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXV
Item #: 43181
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Product Description
Title:Advances in Resist Materials and Processing Technology XXV
Desc:Proceedings of a meeting held 24-29 February 2008, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 6923
Editor:Henderson, Clifford L.
ISBN:9780819471086
Pages:1,310 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2008 )
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