Conference Proceedings

OPTICAL MICROLITHOGRAPHY XXI

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OPTICAL MICROLITHOGRAPHY XXI
Item #: 43182
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Title:Optical Microlithography XXI
Desc:Proceedings of a meeting held 26-29 February 2008, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 6924
Editor:Levinson, Harry J.
ISBN:9780819471093
Pages:1,738 (3 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Mar 2008 )
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