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OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY II

OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY II

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OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY II
Item #: 43253
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Product Description
Title:Optical Micro- and Nanometrology in Microsystems Technology II
Desc:Proceedings of a meeting held 8-10 April 2008, Strasbourg, France. At SPIE Photonics Europe
Series:Proceedings of SPIE Volume 6995
Editor:Gorecki, Christophe
ISBN:9780819471932
Pages:368 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Jun 2008 )
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