 | Title: | Alternative Lithographic Technologies | | Desc: | Proceedings of a meeting held 24-26 February 2009, San Jose, California, USA.
At SPIE Advanced Lithography | | Series: | Proceedings of SPIE Volume 7271 | | Editor: | Schellenberg, Frank M. | | ISBN: | 9780819475244 | | Pages: | 1,166 (2 Vols) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society for Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Mar 2009 ) |
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