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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVI

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVI

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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVI
Item #: 43529
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Product Description
Title:Advances in Resist Materials and Processing Technology XXVI
Desc:Proceedings of a meeting held 23-25 February 2009, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 7273
Editor:Henderson, Clifford L.
ISBN:9780819475268
Pages:1,334 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Mar 2009 )
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