 | Title: | Advances in Resist Materials and Processing Technology XXVI | | Desc: | Proceedings of a meeting held 23-25 February 2009, San Jose, California, USA.
At SPIE Advanced Lithography | | Series: | Proceedings of SPIE Volume 7273 | | Editor: | Henderson, Clifford L. | | ISBN: | 9780819475268 | | Pages: | 1,334 (2 Vols) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society for Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Mar 2009 ) |
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