Conference Proceedings

OPTICAL MICROLITHOGRAPHY XXII

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OPTICAL MICROLITHOGRAPHY XXII
Item #: 43530
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Title:Optical Microlithography XXII
Desc:Proceedings of a meeting held 24-27 February 2009, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 7274
Editor:Levinson, Harry J.
ISBN:9780819475275
Pages:1,206 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Mar 2009 )
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