 | Title: | Alternative Lithographic Technologies II | | Desc: | Proceedings of a meeting held 21-25 February 2010, San Jose, California, USA.
At SPIE Advanced Lithography | | Series: | Proceedings of SPIE Volume 7637 | | Editor: | Herr, Daniel J. C. | | ISBN: | 9780819480514 | | Pages: | 486 (1 Vol) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society For Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Mar 2010 ) |
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