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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVII

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVII

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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVII
Item #: 43895
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Product Description
Title:Advances in Resist Materials and Processing Technology XXVII
Desc:Proceedings of a meeting held 21-25 February 2010, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 7639
Editor:Allen, Robert D.
ISBN:9780819480538
Pages:1,010 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Mar 2010 )
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