 Title: | Optical Metrology and Inspection for Industrial Applications | Desc: | Proceedings of a meeting held 18-20 October 2010, Beijing, China.
At Photonics Asia 2010 | Series: | Proceedings of SPIE Volume 7855 | Editor: | Harding, Kevin G. | ISBN: | 9780819483850 | Pages: | 532 (1 Vol) (approx) | Format: | Softcover | Publ: | SPIE - International Society for Optics and Photonics | POD Publ: | Curran Associates, Inc. ( Nov 2010 ) |
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