OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS

Item #: 44111

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Title:	Optical Metrology and Inspection for Industrial Applications
Desc:	Proceedings of a meeting held 18-20 October 2010, Beijing, China. At Photonics Asia 2010
Series:	Proceedings of SPIE Volume 7855
Editor:	Harding, Kevin G.
ISBN:	9780819483850
Pages:	532 (1 Vol) (approx)
Format:	Softcover
Publ:	SPIE - International Society for Optics and Photonics
POD Publ:	Curran Associates, Inc. ( Nov 2010 )