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ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES III

ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES III

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ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES III
Item #: 44226
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Product Description
Title:Alternative Lithographic Technologies III
Desc:Proceedings of a meeting held 27 February - 3 March 2011, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 7970
Editor:Herr, Daniel J. C.
ISBN:9780819485298
Pages:426 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2011 )
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