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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVIII

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVIII

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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVIII
Item #: 44228
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Product Description
Title:Advances in Resist Materials and Processing Technology XXVIII
Desc:Proceedings of a meeting held 27 February - 3 March 2011, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 7972
Editor:Allen, Robert D.
ISBN:9780819485311
Pages:870 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2011 )
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