27TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

Item #: 44241

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$90.00

Title:	27th European Mask and Lithography Conference
Desc:	Proceedings of a meeting held 18-19 January 2011, Dresden, Germany.
Series:	Proceedings of SPIE Volume 7985
Editor:	Behringer, Uwe F.W.
ISBN:	9780819485533
Pages:	354 (1 Vol) (approx)
Format:	Softcover
Publ:	SPIE - International Society For Optics and Photonics
POD Publ:	Curran Associates, Inc. ( Mar 2011 )