 Title: | 27th European Mask and Lithography Conference | Desc: | Proceedings of a meeting held 18-19 January 2011, Dresden, Germany.
| Series: | Proceedings of SPIE Volume 7985 | Editor: | Behringer, Uwe F.W. | ISBN: | 9780819485533 | Pages: | 354 (1 Vol) (approx) | Format: | Softcover | Publ: | SPIE - International Society for Optics and Photonics | POD Publ: | Curran Associates, Inc. ( Mar 2011 ) |
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