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27TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

27TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

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27TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
Item #: 44241
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$90.00
Product Description
Title:27th European Mask and Lithography Conference
Desc:Proceedings of a meeting held 18-19 January 2011, Dresden, Germany.
Series:Proceedings of SPIE Volume 7985
Editor:Behringer, Uwe F.W.
ISBN:9780819485533
Pages:354 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Mar 2011 )
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