 Title: | Alternative Lithographic Technologies IV | Desc: | Proceedings of a meeting held 13-16 February 2012, San Jose, California, USA.
At SPIE Advanced Lithography | Series: | Proceedings of SPIE Volume 8323 | Editor: | Tong, William M. | ISBN: | 9780819489791 | Pages: | 600 (1 Vol) (approx) | Format: | Softcover | Publ: | SPIE - International Society for Optics and Photonics | POD Publ: | Curran Associates, Inc. ( Apr 2012 ) |
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