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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING
Item #: 44584
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Product Description
Title:Advanced Etch Technology for Nanopatterning
Desc:Proceedings of a meeting held 12-16 February 2012, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 8328
Editor:Zhang, Ying
ISBN:9780819489845
Pages:224 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2012 )
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