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28TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

28TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

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28TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
Item #: 44608
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Product Description
Title:28th European Mask and Lithography Conference
Desc:Proceedings of a meeting held 17-18 January 2012, Dresden, Germany.
Series:Proceedings of SPIE Volume 8352
Editor:Behringer, Uwe F.W.
ISBN:9780819490308
Pages:366 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( May 2012 )
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