 Title: | 28th European Mask and Lithography Conference | Desc: | Proceedings of a meeting held 17-18 January 2012, Dresden, Germany.
| Series: | Proceedings of SPIE Volume 8352 | Editor: | Behringer, Uwe F.W. | ISBN: | 9780819490308 | Pages: | 366 (1 Vol) (approx) | Format: | Softcover | Publ: | SPIE - International Society for Optics and Photonics | POD Publ: | Curran Associates, Inc. ( May 2012 ) |
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