28TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

Item #: 44608

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$90.00

Title:	28th European Mask and Lithography Conference
Desc:	Proceedings of a meeting held 17-18 January 2012, Dresden, Germany.
Series:	Proceedings of SPIE Volume 8352
Editor:	Behringer, Uwe F.W.
ISBN:	9780819490308
Pages:	366 (1 Vol) (approx)
Format:	Softcover
Publ:	SPIE - International Society for Optics and Photonics
POD Publ:	Curran Associates, Inc. ( May 2012 )