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ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS IV

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS IV

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ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS IV
Item #: 44757
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Product Description
Title:Advances in Metrology for X-Ray and EUV Optics IV
Desc:Proceedings of a meeting held 12-16 August 2012, San Diego, California, USA. At SPIE Optical Engineering + Applications
Series:Proceedings of SPIE Volume 8501
Editor:Assoufid, Lahsen
ISBN:9780819492180
Pages:160 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Sep 2012 )
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