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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXX

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXX

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ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXX
Item #: 44938
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Product Description
Title:Advances in Resist Materials and Processing Technology XXX
Desc:Proceedings of a meeting held 25-27 February 2013, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 8682
Editor:Somervell, Mark H.
ISBN:9780819494641
Pages:610 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2013 )
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