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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING II

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING II

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING II
Item #: 44941
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Title:Advanced Etch Technology for Nanopatterning II
Desc:Proceedings of a meeting held 25-27 February 2013, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 8685
Editor:Zhang, Ying
ISBN:9780819494672
Pages:220 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2013 )
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