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MODELING ASPECTS IN OPTICAL METROLOGY IV

MODELING ASPECTS IN OPTICAL METROLOGY IV

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MODELING ASPECTS IN OPTICAL METROLOGY IV
Item #: 45045
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Product Description
Title:Modeling Aspects in Optical Metrology IV
Desc:Proceedings of a meeting held 13-15 May 2013, Munich, Germany. At SPIE Optical Metrology 2013
Series:Proceedings of SPIE Volume 8789
Editor:Bodermann, Bernd
ISBN:9780819496058
Pages:384 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( May 2013 )
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