29TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

Item #: 45142

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$70.00

Title:	29th European Mask and Lithography Conference
Desc:	Proceedings of a meeting held 25-27 May 2013, Dresden, Germany.
Series:	Proceedings of SPIE Volume 8886
Editor:	Behringer, Uwe F.W.
ISBN:	9780819497550
Pages:	204 (1 Vol) (approx)
Format:	Softcover
Publ:	SPIE - International Society for Optics and Photonics
POD Publ:	Curran Associates, Inc. ( Oct 2013 )