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ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXI

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXI

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ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXI
Item #: 45307
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Title:Advances in Patterning Materials and Processes XXXI
Desc:Proceedings of a meeting held 24-27 February 2014, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 9051
Editor:Wallow, Thomas I.
ISBN:9780819499745
Pages:620 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2014 )
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