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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING III

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING III

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING III
Item #: 45310
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Title:Advanced Etch Technology for Nanopatterning III
Desc:Proceedings of a meeting held 23-27 February 2014, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 9054
Editor:Oehrlein, Gottlieb S.
ISBN:9780819499776
Pages:188 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2014 )
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