 | Title: | Advances in Metrology for X-Ray and EUV Optics V | | Desc: | Proceedings of a meeting held 18 August 2014, San Diego, California, USA.
At SPIE Optical Engineering + Applications | | Series: | Proceedings of SPIE Volume 9206 | | Editor: | Assoufid, Lahsen | | ISBN: | 9781628412338 | | Pages: | 158 (1 Vol) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society for Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Oct 2014 ) |
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