30TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

Item #: 45487

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$80.00

Title:	30th European Mask and Lithography Conference
Desc:	Proceedings of a meeting held 24-25 June 2014, Dresden, Germany.
Series:	Proceedings of SPIE Volume 9231
Editor:	Behringer, Uwe F.W.
ISBN:	9781628412857
Pages:	272 (1 Vol) (approx)
Format:	Softcover
Publ:	SPIE - International Society for Optics and Photonics
POD Publ:	Curran Associates, Inc. ( Oct 2014 )