 | Title: | Photomask Technology 2014 | | Desc: | Proceedings of a meeting held 16-18 September 2014, Monterey, California, USA.
| | Series: | Proceedings of SPIE Volume 9235 | | Editor: | Ackmann, Paul W. | | ISBN: | 9781628412987 | | Pages: | 654 (1 Vol) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society for Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Oct 2014 ) |
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