 Title: | Alternative Lithographic Technologies VII | Desc: | Proceedings of a meeting held 23-26 February 2015, San Jose, California, USA.
At SPIE Advanced Lithography | Series: | Proceedings of SPIE Volume 9423 | Editor: | Resnick, Douglas J. | ISBN: | 9781628415254 | Pages: | 574 (1 Vol) (approx) | Format: | Softcover | Publ: | SPIE - International Society For Optics and Photonics | POD Publ: | Curran Associates, Inc. ( Apr 2015 ) |
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