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METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIX

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIX

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METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIX
Item #: 45680
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Product Description
Title:Metrology, Inspection, and Process Control for Microlithography XXIX
Desc:Proceedings of a meeting held 23-26 February 2015, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 9424
Editor:Cain, Jason P.
ISBN:9781628415261
Pages:916 (2 Vols) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2015 )
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