Conference Proceedings

OPTICAL MICROLITHOGRAPHY XXVIII

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OPTICAL MICROLITHOGRAPHY XXVIII
Item #: 45682
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Title:Optical Microlithography XXVIII
Desc:Proceedings of a meeting held 24-26 February 2015, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 9426
Editor:Lai, Kafai
ISBN:9781628415285
Pages:668 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2015 )
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