 Title: | Design-Process-Technology Co-optimization for Manufacturability IX | Desc: | Proceedings of a meeting held 25-26 February 2015, San Jose, California, USA.
At SPIE Advanced Lithography | Series: | Proceedings of SPIE Volume 9427 | Editor: | Sturtevant, John L. | ISBN: | 9781628415292 | Pages: | 384 (1 Vol) (approx) | Format: | Softcover | Publ: | SPIE - International Society for Optics and Photonics | POD Publ: | Curran Associates, Inc. ( Apr 2015 ) |
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