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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING IV

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING IV

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING IV
Item #: 45684
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Product Description
Title:Advanced Etch Technology for Nanopatterning IV
Desc:Proceedings of a meeting held 22-26 February 2015, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 9428
Editor:Lin, Qinghuang
ISBN:9781628415308
Pages:182 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Apr 2015 )
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