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MODELING ASPECTS IN OPTICAL METROLOGY V

MODELING ASPECTS IN OPTICAL METROLOGY V

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MODELING ASPECTS IN OPTICAL METROLOGY V
Item #: 45782
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Product Description
Title:Modeling Aspects in Optical Metrology V
Desc:Proceedings of a meeting held 23-25 June 2015, Munich, Germany. At SPIE Optical Metrology
Series:Proceedings of SPIE Volume 9526
Editor:Bodermann, Bernd
ISBN:9781628416862
Pages:410 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Jun 2015 )
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