 Title: | Alternative Lithographic Technologies VIII | Desc: | Proceedings of a meeting held 22-25 February 2016, San Jose, California, USA.
At SPIE Advanced Lithography | Series: | Proceedings of SPIE Volume 9777 | Editor: | Bencher, Chris | ISBN: | 9781510600126 | Pages: | 440 (1 Vol) (approx) | Format: | Softcover | Publ: | SPIE - International Society for Optics and Photonics | POD Publ: | Curran Associates, Inc. ( Jul 2016 ) |
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