 | Title: | Alternative Lithographic Technologies VIII | | Desc: | Proceedings of a meeting held 21-25 February 2016, San Jose, California, USA.
At SPIE Advanced Lithography | | Series: | Proceedings of SPIE Volume 9777 | | Editor: | Bencher, Chris | | ISBN: | 9781510600126 | | Pages: | 440 (1 Vol) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society For Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Jul 2016 ) |
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