Conference Proceedings

OPTICAL MICROLITHOGRAPHY XXIX

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OPTICAL MICROLITHOGRAPHY XXIX
Item #: 46032
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Title:Optical Microlithography XXIX
Desc:Proceedings of a meeting held 23-25 February 2016, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 9780
Editor:Erdmann, Andreas
ISBN:9781510600157
Pages:532 (1 Vol)
Format:Softcover
TOC:View Table of Contents
Publ:SPIE - International Society for Optics and Photonics
POD Publ:Curran Associates, Inc. ( Aug 2016 )
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