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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING V

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING V

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING V
Item #: 46034
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Product Description
Title:Advanced Etch Technology for Nanopatterning V
Desc:Proceedings of a meeting held 21-25 February 2016, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 9782
Editor:Lin, Qinghuang
ISBN:9781510600171
Pages:150 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Jul 2016 )
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