 | Title: | Advances in Metrology for X-Ray and EUV Optics VI | | Desc: | Proceedings of a meeting held 29 August 2016, San Diego, California, USA.
At SPIE Optical Engineering + Applications | | Series: | Proceedings of SPIE Volume 9962 | | Editor: | Assoufid, Lahsen | | ISBN: | 9781510603158 | | Pages: | 100 (1 Vol) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society for Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Dec 2016 ) |
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