 | Title: | Photomask Technology 2016 | | Desc: | Proceedings of a meeting held 12-14 September 2016, San Jose, California, USA.
| | Series: | Proceedings of SPIE Volume 9985 | | Editor: | Kasprowicz, Bryan S. | | ISBN: | 9781510603745 | | Pages: | 510 (1 Vol) | | Format: | Softcover | | TOC: | View Table of Contents | | Publ: | SPIE - International Society for Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Dec 2016 ) |
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