CHEMICAL-MECHANICAL PLANARIZATION. (SYMPOSIUM I AT THE 2002 MRS SPRING MEETING)

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000303
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  • Title: Chemical-Mechanical Planarization
  • Subtitle: Symposium I at the 2002 MRS Spring Meeting
  • Date/Location: Held 1-5 April 2002, San Francisco, California, USA.
  • Series: Materials Research Society Symposium Proceedings Volume 732
  • ISBN: 9781558996687
  • Pages: 140 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
  • POD Publisher: Curran Associates, Inc. ( Oct 2006 )

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  • Title: Chemical-Mechanical Planarization
  • Subtitle: Symposium I at the 2002 MRS Spring Meeting
  • Date/Location: Held 1-5 April 2002, San Francisco, California, USA.
  • Series: Materials Research Society Symposium Proceedings Volume 732
  • ISBN: 9781558996687
  • Pages: 140 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
  • POD Publisher: Curran Associates, Inc. ( Oct 2006 )