 | Title: | Atomic Layer Deposition | | Desc: | Proceedings of a meeting held 16-21 October 2005, Los Angeles, California.
Held at 208TH ECS Meeting | | Series: | ECS Transactions Volume 1 No.10 | | Editor: | Londergan, A.R. | | ISBN: | 9781566774437 | | Pages: | 144 (1 Vol) | | Format: | Softcover | | TOC: | View Table of Contents | | Publ: | Electrochemical Society (ECS) | | POD Publ: | Curran Associates, Inc. ( Dec 2006 ) |
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